0.5-1.5mil film thickness changes after 90 minutes immersed in kinds of solvent at room temperature(measured by infrared method)
|
solvent |
Parylene Thickness Variations（%） |
|
Parylene N |
Parylene C |
Parylene D |
|
Isopropyl alcohol |
0.3 |
0.1 |
0.1 |
|
Isooctane |
0.2 |
0.4 |
0.3 |
|
pyridine |
0.2 |
0.5 |
0.5 |
|
Mixed xylene |
1.4 |
2.3 |
1.1 |
|
Trichloroethylene（TCE） |
0.5 |
0.8 |
0.8 |
|
Chlorobenzene |
1.1 |
1.5 |
1.5 |
|
Dichlorobenzene |
0.2 |
3 |
1.8 |
|
Trichlorodifluoroethane |
0.2 |
0.2 |
0.2 |
|
Acetone |
0.3 |
0.9 |
0.4 |
|
A ketone of glutaric |
0.6 |
1.2 |
1.4 |
|
Deionized water |
0 |
0 |
0 |
0.5-1.5mil film thickness changes after 90 minutes immersed in kinds of reagent at room temperature(measured by infrared method)
|
Reagent |
Concentration |
Parylene Thickness Variations（%） |
|
Parylene N |
Parylene C |
Parylene D |
|
Hydrochloric acid |
10% |
0 |
0 |
0.1 |
|
Concentrated hydrochloric acid |
37% |
0.2 |
0 |
0.5 |
|
Sulfuric acid |
10% |
0.1 |
0.3 |
0.2 |
|
Concentrated sulfuric acid |
95-98% |
0.2 |
0.4 |
0.8 |
|
Nitric acid |
10% |
0.1 |
0.1 |
0.2 |
|
Concentrated nitric acid |
71% |
0.2 |
0.2 |
0.5 |
|
Chromic acid |
10% |
0.1 |
0.1 |
0.1 |
|
Concentrated chromic acid |
74% |
0.3 |
0 |
0.2 |
|
Strong base (sodium hydroxide) |
10% |
0.1 |
0 |
0.1 |
|
Weak base (ammonium hydroxide) |
10% |
0.3 |
0.2 |
0.1 |
